EUV light source by high power laser

High Efficiency Collector for Laser Plasma EUV Source

Investigation of absorption pump light distribution in edged-pumped high power Yb:YAGYAG disk laser

In this article, we present a specific shape of disk laser which is side-pumped by four non-symmetric hollow- ducts. The use of non-symmetric hollow duct based on two goals of the uniformity of the pump light distribution profile and the homogeneity of pump light profile through the disk. First of all we simulated the pump light distribution in the disk by using Monte-Carlo ray tracing method. ...

Imaging Diagnostics of Debris from Double Pulse Laser-Produced Tin Plasma for EUV Light Source

The dynamics of debris from laser produced Tin (Sn) plasma was investigated for EUV light source. The kinetic behaviors of the Sn atoms and of the dense particles from Sn droplet target irradiated by double pulses from the Nd:YAG laser and the CO2 laser were also investigated by the laser-induced fluorescence imaging method and a high-speed imaging, respectively. After the pre-pulse irradiation...

CO2 Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography

High average power EUV light source has been the “most critical” issue in the research and development of the EUV lithography system in one decade. EUV LLC and International Sematech significantly stimulated the global research community to work seriously to advance plasma technology in achieving the goal of the EUV source, required by the semiconductor industry. It is instructive to look into ...

Generation of high-power laser light with Gigahertz splitting.

We demonstrate the generation of two high-power laser beams whose frequencies are separated by the ground state hyperfine transition frequency in (87)Rb. The system uses a single master diode laser appropriately shifted by high frequency acousto-optic modulators and amplified by semiconductor tapered amplifiers. This produces two 1 W laser beams with a frequency spacing of 6.834 GHz and a relat...